高精度激光加工设备隔振系统的设计

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With the continuous improvement of the accuracy requirements of the laser processing,the stability of the processing equipment are more and more attention.The finite element method is used to analysis the natural frequency and harmonic analysis for high-precision laser processing equipment,and using the air spring to vibration damping for the entire system.The study results showed that the laser processing equipment having a higher natural frequency,the system is more stable when the external excitation frequency is significantly smaller than the first natural frequency,and the damping effect of the air spring under different vibration frequencies are very well,and meet the damping requirements.随着激光加工精度要求的不断提高,加工设备系统的稳定性问题受到越来越多的重视。利用有限元方法对高精度激光加工设备的固有频率和谐响应进行了分析,并采用空气弹簧对整个系统进行减振处理。研究结果表明该激光加工设备具有较高的固有频率,当外部激励频率明显小于一阶固有频率时系统较稳定,并且不同振动频率下空气弹簧的减振效果均较高,满足设备的减振要求。