精密减振-定位复合系统建模与分析

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dynamic modeling and analysis oi the composite system of precision positioning and vibration isolation is proposed. In this system both the active vibration isolation control and the positioning control are employed. For active control in vibration isolation system, a dynamic analysis of the velocity feedback and feedforward is brought up; for precision positioning control, which means the secondary development modeling of the PID feedback control and feedforward control, an analysis of different control methods＇ influence to the position precision and vibration isolation performance is made. Besides, an accurate and feasible method for the establishment of the dynamic model of mechanical systems with active vibration isolation units is proposed.对精密减振定位系统中的主动减振控制和定位控制进行动力学建模与分析。对减振系统中的主动控制即绝对速度反馈和前馈进行动力学分析，同时分析其对定位控制的影响；对精密定位控制即PID反馈控制和前馈控制环节进行二次开发建模，分析不同控制对位置精度和隔振性能的影响，同时为建立含有主动减振单元的机械系统动力学模型提供一种准确可行的方法。