超精密运动平台主动隔振系统动力学模型理论与实验研究

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超精密运动平台振动控制系统是一个带不确定非线性系统。搭建了精密运动平台减振系统,设计了一种以空气弹簧为隔振元件,主/被动隔振在主动隔振和被动隔振之间通过开启电源进行切换的系统,分析并构建了系统的动力学模型,并对平台的主动隔振系统进行测试研究。理论分析和实验结果证实了主动隔振系统可行性,有效提高了加工系统的隔振效果,为平台进行高精密加工提供了保证,同时,为主动隔振系统及相关系统动力学研究提供了一种方法。 Control system of vibration isolation is an uncertain and nonlinear system Ultra-precision platform.The vibration reduction system of the vibration isolation platform is designed.A device with air springs was designed in the system.Switch of passive and active isolation system carried out by the power supply,and analyzed and built a system dynamics model.The testing result indicates that the active vibration control system of the vibration isolation platform can reduce the vibration.It provides a nice vibration isolation environment and a new way for dynamics studies of active vibration isolation system,or relative systems.