精细刻痕深度的检测技术

利用常规的干涉显微镜和立式光学计管或接触式干涉仪光管组合，并对干涉显微镜读数目镜进行技改，用来检测精细刻痕深度。例举单刻线样板进行实测和比对的结果，证明所探讨的技术方案可行。

Useing conventional interference microscope and vertical type optimeter light pipe or contacting interferometer light pipe, and improving indication eyepiece of microscope technically to detect subtle indentation . This paper gave an example of single groove specimen measuring and comparison result. The technical proposal was proved to be practicable,and can be applied broadly.

刻痕深度，干涉显微镜，单刻线样板，indentation，interference microscope，single groove specimen。

精细刻痕深度的检测技术。