扫描镜非接触式检测系统的位置误差分析

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为了满足非接触式扫描镜检测系统的位置检测精度要求，分析系统各误差源对扫描镜位置检测精度的影响，制定详细的系统总体误差分配方案。分析系统的主要误差源，根据系统相关参数，利用齐次坐标转换法，建立系统引入误差量的数学模型，计算各误差源的误差传递系数 参考误差传递系数，根据加工、装调和检测水平相关数据，应用蒙特卡罗法分析计算，进行误差分配。结果表明’加工、装调能力无法达到该系统的精度要求，提出了一种依据目前的检测水平进行误差分配的方法，最终应用误差补偿实现扫描镜位置检测极限误差优于2.5＂。采用一字线激光器作为光源，通过0.5＂莱卡经纬仪和千分表进行检测，达到系统要求的检测精度。

In order to meet the requirements of the non-contact detection system＇s position detectionaccuracy which was applied to detect the movement characteristics of scanning mirror. The analysis onvarious error sources of the detection system was made and all the errors which affect the positiondetection accuracy of the scanning mirror were detailed. The mathematical model with errors was set upand the transferring coefficients of the error sources were calculated based on the coordinatetransformation method and the relevant parameters of the system. According to the error transferringcoefficients and the related data of the current processing and assembly, the calculation of errordistribution was given with the Monte Carlo method. The results show that the current processing,assembly capacity can、meet the accuracy requirements of the system, and a new method of the errordistribution based on the current detection was put forward. The scanning mirror position detection limitsof error was better than 2.5〃. In order to realize the detection accuracy of the system requirements, theline laser was used as the light source, and the 0.5〃 Lycra theodolite and micrometer were applied todetect the assembly.

扫描镜，误差分析，坐标变换，蒙特卡罗法，scanning mirror，error analysis，coordinate transformation，Monte Carlo method。

扫描镜非接触式检测系统的位置误差分析。