电子厂房结构的微振动特性研究

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With the development of modem precision manufacturing technology, environmental micro-vibration require- ments for equipment have become more sophisticated. Because the device is installed on the structure above, very suscep- tible to external force vibration affect the normal work of equipment. The research structure by the external force is the amount of vibration of great significance for precision manufacturing.随着现代精密制造技术的发展，设备对环境微振动要求也越来越高，因为设备安装在架空的结构上面，很容易受外力扰动产生的振动影响设备的正常运行。研究结构受外力扰动产生的振动量对于精密制造有着重要的意义。