运用Sawyer Tower电路测试薄膜铁电性能

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The surface acoustic wave（SAW） sensors of methane are novel devices, and the PZT-based ferroelectric thin films with excellent piezoelectricity is important for SAW sensors. The ferroelectricity is an important behavior for the piezoelectric thin films for sensors, and so it＇ s necessary to characterize the ferroelectricity. In this paper, the PZT-based thin films are deposited by sputtering method, and the design with Sawyer Tower circuit is given, and the measurement system is established for the characterizations. The results show that the Sawyer Tower circuit is accurate to measure the ferroelectricity, which is expected to be applied in extensive application.声表面波煤矿瓦斯传感器是一种新型瓦斯传感器，PZT基高压电铁电薄膜是该类传感器制备的理想功能材料，铁电性作为PZT基铁电薄膜的另一个重要性能对传感器的工作特点和稳定性具有重要影响。因而，测试并掌握具有高压电性铁电薄膜的铁电性也是器件材料表征的一项重要工作。采用SawyerTower电路原理，自主设计铁电测试电路，制备PZT基铁电薄膜，并利用该电路测试薄膜的铁电性。由实验结果可知，自主设计的SawyerTower电路能简便、有效、准确和直观的测试薄膜的铁电性能，有望广泛应用于薄膜铁电性能测试及研究。