抛光磨头摆动机构建模与运动仿真

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In order to study the vibration of the polishing head swinging mechanism, the three-dimensional model of the polishing head swinging mechanism was built based on Solidworks and the angular displacement, ve- locity and acceleration of the mechanism were analyzed in the COSMOSMotion. The simulation results showed that the movement law of the active swinging link was just different from the passive link, between the cam and the active link existed lager contact gap and and the active link and motion accuracy of the passive link was low. It pro- vided the foundation and necessary mechanism for the further study of the polishing head.为了研究抛光磨头摆动机构的振动问题,采用SolidWorks软件建立抛光磨头摆动机构的三维模型图,并利用其COSMOSMotion插件对该机构摆动的角位移、速度和加速度进行分析.结果表明,该款磨头的主动摆杆与从动摆杆运动规律正好相反,但是凸轮与主动摆杆间存在较大接触间隙以及从动摆杆的运动也存在较大误差,为进一步的研究并改善抛光磨头的性能奠定了基础.