新型光干涉法纳米级润滑膜厚度测量仪

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润滑膜厚度的测量是开展纳米量级薄膜润滑状态研究的关键问题。利用光干涉法相对光强原理研制出一种纳米级润滑膜厚度测量仪，在低速低载荷条件下对点接触纯滑动润滑接触中心区润滑膜厚度进行测量，并讨论接触中心区和润滑膜厚度与速度和载荷之间的关系。结果表明：已测量的膜厚值已达到纳米量级，在设定工况下润滑膜厚度随速度增大而增大，随载荷增大而减小；比较Hamrock-Dowson公式计算结果和实验结论证明，这种仪器能有效实现对纳米级润滑薄膜厚度的测量。 The measurement of lubrication film thickness is one of the key aspects in the study of nanometer thin film lubrication. According to the relative light intensity principle, a new measuring instrument for nanometer lubrication film thickness was developed. The film thickness on the contact area in point contact and pure sliding lubricating condition was measured by the measuring instrument, the effects of speed and load on the film thickness was studied. The results show that the film thickness in the range of nanometer-level increases with the increase of the speed, and decreases with the in- crease of the load, but the tendencies deviate slightly from the results of Hamrock-Dowson equation. Comparing the results of Hamrock-Dowson equation and the experimental results, it is proved that the measuring instrument can effectively implement the measurement of nanometer lubrication film thickness.