压电驱动膜片式微滴喷射仿真与尺度一致性试验研究

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Simulation and Experiment Study on Piezoelectric ActuatedDiaphragm-driven M icrodroplet JettingZHOU Shigui XI Juntong ，(1.School of Mechanical Engineering，Shanghai Jiao Tong University，Shanghai 200240；2.State Key Laboratory of Mechanical System and Vibration，Shanghai Jiao Tong University，Shanghai 200240)AbsWact：Micro-droplet jeting technology，a digital controled micro-droplets generation and dispensing technology，is showingstrong potential for application.A piezoelectric actuated diaphragm driven micro·droplet jeting technology is presented to overcomethe defects ofthe existing microjetting technology.The primary principle ofthe piezoelectric actuated diaphragm-driven microjettingtechnology is introduced an d theoretical analysis is made to establish the mathematical mode1.Two-dimensional axisymrnetricsimulation model is built to predict the fluid interface during microjet process by CFD software and volume of fluid(VOF)method。

The efect ofthe parameters on the droplet ejection characteristics based simulations is analyzed，such as droplet diameter and dropletejection velocity.On the basis of the simulation results，a piezoelectric actuated diaphragm-driven microdroplet jetting experimentalsystem is developed and made experiments using liquid material with viscosity ranging from 0 cP to 1 50 cP.The experimentsdemonstrate that this microjeting technology has a good performance on micron droplets generation and dispensing.And theexperimental results agree wel with the simulation results，which proves this simulation model and method is correct。

Key words：Piezoelectric actuated diaphragm·driven Drop-on-demand Simulation Micro-droplet jeting experiment0 前言微滴喷射技术是-种数字化控制微米级液滴国家自然科学基金资助项E(50975178) 20130105收到初稿，20130320收到修改稿产生和分配的技术。由于具有非接触性、高效率、高材料利用率等优点，基于微滴喷射技术的加工制造工艺在微电子封装、微机 电系统(Micro-electro。

mechanical systems，MEMS)、微光学元器件制作、生物制造工程等领域展现出巨大的应用潜力 J。目前，国内外对微喷装置设计及微滴喷射理论进行了