mems微悬臂梁可靠性研究现状

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mems微悬臂梁可靠性研究现状 论文 关键词：MEMS微悬臂梁可靠度论文摘要： MEMS(Micro-electronics Mechanical System)的可靠性已经成为它能否成功地实现产品化的-个重要问题。多晶硅微悬臂梁是MEMS中的-个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。本文就近年来国内外所开展的有关多晶硅微悬臂梁的在多种失效机理下可靠性研究情况进行了综述，并对今后这-领域的研究方向进行了展望。Key words: MEMS; micro-cantilever; reliabilityAbstract: The reliability of MEMS is a key problem for its commercial application. Poly-silicon micro-cantilevers is a basic structure， as a combination of mechanical and electrical components， place an irreplaceable part in MEMS. In this paper， at home and abroad in recent years carried out by the relevant silicon micro-cantilever in a variety of the failure mechanism under the reliability of the research are reviewed， The prospective research directions of the Reliability for poly-silicon micro-cantilever in the future are forecasted.

1 引言 微 电子 机械系统简称MEMS(Micro Electro-Mechanical Systems)已广泛用于国防、医疗、航空航天、汽车等领域，如今人们已不满足于MEMS某些