压电驱动FSM的动态性能分析

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Fast steering mirrors（FSMs） are used to control light beams as implement devices.So their outstanding dynamic performances are strictly demanded in a lot of situations.Finite element analysis method and dynamic model method are used to analyze a certain FSM’s dynamic performance.And a material object is designed,fabricated and tested,and its dynamic property curve is obtained.Non-linear property and mechanical resonance expressed by the curve are researched and theirs causes are proved.Simultaneously it is found out that another influence factor,the winding mode of the other two piezoelectric stacks engendered by the reinforce layer and inner friction,restricts the dynamic performance of a FSM driven by long piezoelectric stacks.快速倾斜镜（FSM）常用作光束控制的执行装置,很多场合都要求其具有优秀的动态性能。利用有限元分析法和动态模型方法对某FSM的动态性能进行了分析。对设计制造的FSM实物实施了动态性能测试,分析和验证了频率特性曲线中所表现的非线性和机械谐振特性,发现加固层和结构摩擦作用下激发出的压电堆叠弯曲模态也是FSM动态性能的制约因素。