随机表面粗糙度对MEMS径向气体轴承性能的影响

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基于分形几何理论表征了MEMS径向气体轴承的随机粗糙表面,修正了气体的雷诺方程,研究了径向轴承中气体薄膜在滑移效应和粗糙度耦合作用下的压强分布、承载能力等轴承特性。结果表明：由于表面粗糙度的影响,气体轴承压力分布、承载能力具有非线性特性,波动较明显。 In this paper,the random rough surface on the gas-lubricated journal bearing in MEMS is characterized by fractal geometry.A modified Reynolds equation,in which the coupled effects of velocity slip and surface roughness are taken into account,is developed to investigate the general properties including pressure distribution and load carrying capacity of the journal bearing.The results show that surface roughness plays very important role on the bearing characteristics.The pressure distribution and load carrying capacity of the gas-lubricated journal bearing have nonlinear characteristics and their fluctuations are obvious under the surface roughness effect.