载荷对含Cr碳膜摩擦磨损性能影响研究

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用闭合场非平衡磁控溅射技术制备了高硬度含Cr碳膜。分别用压入法和划痕法测定了薄膜的结合强度。薄膜厚度用球坑法表征。用显微硬度计测定了薄膜的努氏硬度。在不同载荷条件下,用Ball-on-disc球盘磨损试验机研究了薄膜的摩擦系数、比磨损率的变化规律。分析讨论了载荷对含Cr碳膜摩擦磨损性能的影响。结果发现：随着载荷的提高,对磨钢球时薄膜的摩擦系数呈下降趋势.对磨损轨迹和对磨球磨损表面的扫描电镜（SEM）观察发现存在转移膜现象。对磨球磨损表面的EDX分析结果进一步证明了转移膜的存在。文中还对含Cr碳膜磨损机理进行了分析和讨论。 The high hardness Cr-containing carbon films are deposited using a closed unbalanced field magnetron sputter ion plating system. The film adhesion is evaluated using Rockwell indentation and scratch methods. The thickness of films is measured using a ball rater tester. The Knoop hardness of films is determined using a micro Vickers hardness tester. Friction coefficient and specific wear rate are investi- gated using a Ball-on-disc tester under various applied loads against a steel ball. The effect of normal load on the tribological behavior of film is investigated. The results show that friction coefficient of films decreases with the increase in the applied loads. The transfer layer on the worm surface of counterpart ball is observed from the SEM and EDX results. The wear mechanism of Cr-containing carbon film is also dis- cussed.