一种容易实现的硅片分类机

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-种容易实现的硅片分类机

本着实现半导体硅片分类机全部自主知识产权的目的，这里介绍-种关键零部件国内设计、制造的200 ram(8英寸)以上的半导体硅片分类。本分类机用紧凑的结构(包括单个机械手和两套硅片标识识别装置)，采用了较好的图像处理软件和可靠的字符标识识别软件，实现了制造成本低、识别成功率高、可靠性好、便于实现的结果￠绍了分类机的试验样机经过试验，已经证明了其主要功能的有效性。因此，此分类机具有产品化可能。

Abstract：M otivated by a desire to have our independent inteiiectual rights ofwafer soer，here a above 8 inch silicon wafer sorter is introduced .The key parts of the sorter are designed and manufactured domestically .It，s structure is compactly laid out，it includes single robot and two silicon marking recogn ition equipments；The reliability of silicon marking recogn ition is high owing to that bettermage Drocessing software and reliable alphanumeric marking recogn ition software are adopted；Also the cost of the sorter is lower.The test of the sorterS sample already has proved the validity of the main functions of the sorter.So，the productization of the wafer sorter could be realized.
Keywords：Robot：W afer transfer；Wafer S notch align ment；M arking recogn ition