激光干涉仪线性测长的准直调节方法

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概述了激光干涉仪在半导体工艺设备精度分析领域的应用，简单介绍了光路准直对线性测长的影响。依据激光干涉仪的准直测量原理，详细介绍了激光干涉仪准直的调节方法。

This paper overviews the application of laser interferometer in the precision analysis of semiconductor process equipment. The laser straightening effecting on linear measuring is introduced. According to the Straightening Principle of the laser interferometer, a method of straightening the laser interferometer is given in detail.

激光干涉仪，光路准直，精密测量，Laser interferometer，Straightening the laser，Precision measurement。

激光干涉仪线性测长的准直调节方法。