一种新型并联XYY微定位平台动力学建模及控制仿真

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介绍一种新型的压电陶瓷驱动的并联XYY结构微定位平台。该平台通过Y方向两个压电驱动器的实时校正,能够避免因加工装配误差引起的结构非对称性对平台运动直线度的影响。推导微定位平台的动力学模型。通过引入过程噪声的数学模型增广LQG控制器,实现微定位平台解耦和跟踪,仿真发现这种方法能够有效抑制窄带随机扰动,提高定位精度。 A novel micro positioner based on piezo-electric actuators was designed. With compensation of two piezo-electric actuators fixed along Y direction, bad influence of manufacturing and assembling error on the displacement straightness of the positioner was greatly reduced. Dynamic model of the positioner was developed. A control strategy based on LQG （linear quadratic Gaussian） controller augmented by model of noise from base structure was studied. Computer simulation indicated that the motion of the positioner is decoupled and the positioner can track reference input well and work well with narrow-band stochastic interference from base structure greatly depressed.