压电泵的研究

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压电泵的研究AbstractIn order to supply liquid fuel in DMFC (Direct
Methanol Fuel Cell) system， a small but high-output
micropump is needed. This study presents a design concept，
fabrication and experimental results of the newly devised
piezoelectric micropump by using resonance and fluid inertia.
The micropump consists of a resonantly-driven pumping unit，
an inlet check valve， and a pipeline element with a small
diameter employed in an outlet. The resonance mechanism
is used to oscillate the pumping chamber. It simply magnifies
a small displacement of the used multilayer-piezoelectric
actuator. The fluid inertia effect uses a fast flow through
a narrow pipeline element employed instead of the
outlet check valve. First， an analysis on each element
such as a diaphragm and a check valve is performed.
Based on the obtained analysis results， a prototype
micropump is designed， and fabricated. Then， pumping
characteristics such as frequency-dependent displacement，
and flow rate without load pressure are experimentally
investigated. Finally， a refabrication of the micropump is
carried out to improve load characteristics， and the
obtained experimental results are presented and discussed.
KeywordsPiezoelectric pump.Resonance.Fluid inertia.
Check valve.
Structural analysis