一种光纤组量程扩增的激光频率扫描干涉绝对测距系统

A Range Amplified Absolute Distance M easurement System with LaserFrequency Sweeping Interferometry by Optical Fiber PairsLU Tao， LIU Zhigang，DENG Zhongwen，TAO Long，GONG Hai(State Key Laboratory for Manufacturing Systems Engineering，Xian Jiaotong University，Xian 710049，China)Abstract： A precision compensation method for large scale of absolute distance measurement withrange amplification technology by optical fiber pairs is proposed，which can be used to maintainmeasurement accuracy for laser frequency sweeping interferometry(FSI)system with obj ectdistanceS accretion. A range amplified absolute distance measurement system with laserfrequency sweeping interferometry is established by a variable and incremental reference path，theoptical path difference of the range amplified part is self-calibrated in FSI measuring way. Theorigin of the system is self-calibrated and the reference path is switched after rough measurement，then the measuring result is achieved after fine measurement.The range amplified system withoptical fiber pairs has a higher absolute distance repeatability precision when the object distancegets larger than 3 000 mm.The repeatability precision of the range amplified system is increasedby 2.4 m compared with FSI system for absolute distance of 6 700 mm。

Keywords：laser frequency sweeping interferometry；range amplification with optic fiber pairs；self-calibration of the origin；lager scale metrology目前，高精度大尺寸的绝对距离测量(ADM)已 在空间大尺寸无导轨测量和大型工件生产加工的在收稿 日期：2013-02-01。 作者简介 ：吕涛(1988-)，男，博士生；刘志刚(通信作者)，男，副教授。 基金项 目：国家 自然科学基金资助项 目(50975225，50935006)；国家863计划”资助项目(2O12AAO407O1)。

网络出版时间：2013-06-17 网络出版地址：http：///kcms/detail/61.1069.T.20130617.0840.003.html西 安 交 通 大 学 学 报 第 47卷线检测 中得到了广泛的应用。半导体激光频率扫描干涉 (FSI)是 -种很有 前景 的绝对距 离测量 方法 ，国内外对基于该方法 的测距系统进行 了大量的研究。美国密西根大学将 FSI测距系统应用于正负电子对撞机(NLC)的探测器跟踪校对 ，在实验