基于纳米压痕技术及有限元模拟的薄膜力学性能研究

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A method of determining mechanical properties of thin films was developed by combining nano-indentation with finite element method and dimensional analysis. The simulations of indentation process were performed as a first step. The dimensional analysis was then applied to derive the relationship between indentation and mechanical properties of material. Furthermore, the stress strain curve was figured out, according to the real Load-Depth curves and the value of E got in the nano-indentation experiments and the dimensionless functions. Finally, the Load-displacement curve by the FEM was compared with the actual Load- displacement curve of the nano indentation. A good correlation was demonstrated and the validity of the proposed method was therefore proved.采用纳米压痕技术结合有限元模拟和量纲分析方法分析薄膜材料的弹塑性性能．用有限元模拟纳米压痕过程，结合量纲分析方法将纳米压痕的加卸载过程与被测材料的力学性能联系起来，建立起两者间的无量纲函数关系结构式，进而结合实际纳米压痕试验所得薄膜的弹性模量和载荷-位移曲线计算出了材料的应力-应变关系．经检验，有限元模拟所得到载荷位移曲线和纳米压痕试验所得载荷-位移曲线吻合得比较好，因此验证了有限元模型的正确性和材料模拟的正确性．