空间齿轮传动副用材料离子注入改性工艺研究

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对空间机械的齿轮传动副用材料进行Ti＋N离子注入表面改性研究，考察不同注入能量和剂量条件下的改性材料的硬度和真空摩擦磨损性能，获得表面改性效果优异的离子注人工艺参数。结果表明，在注入能量为Ti^＋／45keV＋N^＋／65keV，注入剂量为7×10^17cm^-2的工艺参数条件下，改性材料的真空摩擦学性能相对最好，表面改性效果最佳。 The surface modification technology of the material used for space gear transmission pairs with Ti ＋ N ions implantation was studied, the microhardness and performance of vacuum tribology were tested for the modified materials prepared under different technological parameters of implanted energy and dose. The optimized technological parameters were obtained. It is found that the materials implanted with parameters of Ti ＋/45 keV ＋ N ＋/65 keV and 7 × 10^17 cm^ -2 has the best tribological performances.