二维解耦微位移工作台的设计和有限元分析

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文中设计了一驱动器固定的二维解耦微位移工作台。根据所选微位移驱动器和微位移工作台空载达到最大位移时所需的驱动力，得到微位移工作台的理论设计刚度值，据此对微位移工作台进行设计，然后对其进行有限元计算，求得微位移工作台刚度的有限元计算值，刚度的理论值和有限元计算值吻合得很好，并且很好地解决了运动耦合问题，定位精度高。

A new two-dimension decoupling micro-displacement worktable driven by a fixed actuator is designed. According to the selected Micro-displacement actuator and the driving force of the micro-displacement worklable required when the no-load reach to the maximum displacement of the micro-displacement worktable, theoretical designed stiffness values is obtained. A micro-displacement working table is designed. Finite element calculated value of the micro-displacement worktable stiffness is got by finite element calculation of the micro-displacement working table. The stiffness of the theoretical and finite element calculation is in good agreement with values. Thus the motion coupling problem is solved, and high positioning accuracy is obtained.

微位移工作台，柔性铰链，二维，解耦，刚度，micro-displacement workable，flexure hinge，two-dimension，decoupling，stiffness。

二维解耦微位移工作台的设计和有限元分析。