基于光通量的微孔快速检测原理研究

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针对微孔检测中精度和效率亟待提高的问题，首次提出了基于光通量的微孔几何参数快速检测理论和技术。研究基于微弱光通量检测的微子L测量传感器测量原理和用于微弱信号处理的电路设计。通过对五种不同规格的微孔进行检测，拟合出基于光通量法检测微孔电压值与图像检测数据的关系曲线。最后分析了测量系统的误差来源和特点，研究了误差补偿技术，并通过实验验证了基于光通量法微孔检测原理的可行性和有效性。

With the increasing demand of the accuracy and efficiency of microaperture measuring, a new measuring theory and technology for measurement of microaperture, which using luminous flux, is presented. The hasic principle of microaperture measuring sensor and weak signal processing circuit are studied. A curve between the value of voltage and area is fit through detection five different types of microaperture. Finally, error sources and characteristics of the measurement system are analyzed to study the error compensation technology, verify the feasibility and effectiveness based on luminous flux method are verified.

微孔，光通量，检测，误差，mieroaperture，luminous flux，measurement，error。

基于光通量的微孔快速检测原理研究。